Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate
2008-09-09
2008-09-09
Meeks, Timothy (Department: 1792)
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
Reexamination Certificate
active
11131899
ABSTRACT:
A method of processing a workpiece includes introducing an optical absorber material precursor gas into a chamber containing the workpiece, generating an RF oscillating toroidal plasma current in a reentrant path that includes a process zone overlying the workpiece by applying RF source power, so as to deposit a layer of an optical absorber material on the workpiece, and exposing the workpiece to optical radiation that is at least partially absorbed in the optical absorber layer.
REFERENCES:
patent: 2344138 (1944-03-01), Drummond
patent: 3109100 (1963-10-01), Gecewicz
patent: 3576685 (1971-04-01), Swann et al.
patent: 3907616 (1975-09-01), Wiemer
patent: 4116791 (1978-09-01), Zega
patent: 4382099 (1983-05-01), Legge et al.
patent: 4385946 (1983-05-01), Finegan et al.
patent: 4434036 (1984-02-01), Hoerschelmann et al.
patent: 4465529 (1984-08-01), Arima et al.
patent: 4481229 (1984-11-01), Suzuki et al.
patent: 4500563 (1985-02-01), Ellenberger et al.
patent: 4521441 (1985-06-01), Flowers
patent: 4539217 (1985-09-01), Farley
patent: 4565588 (1986-01-01), Seki et al.
patent: 4584026 (1986-04-01), Wu et al.
patent: 4698104 (1987-10-01), Barker et al.
patent: 4764394 (1988-08-01), Conrad
patent: 4778561 (1988-10-01), Ghanbari
patent: 4867859 (1989-09-01), Harada et al.
patent: 4871421 (1989-10-01), Ogle et al.
patent: 4892753 (1990-01-01), Weng et al.
patent: 4912065 (1990-03-01), Mizuno et al.
patent: 4937205 (1990-06-01), Nakayama et al.
patent: 4948458 (1990-08-01), Ogle
patent: 4951601 (1990-08-01), Maydan
patent: 5040046 (1991-08-01), Chhabra et al.
patent: 5061838 (1991-10-01), Lane et al.
patent: 5074456 (1991-12-01), Degner et al.
patent: 5106827 (1992-04-01), Borden et al.
patent: 5107201 (1992-04-01), Ogle
patent: 5270250 (1993-12-01), Murai et al.
patent: 5277751 (1994-01-01), Ogle
patent: 5288650 (1994-02-01), Sandow
patent: 5290382 (1994-03-01), Zarowin et al.
patent: 5290731 (1994-03-01), Sugano et al.
patent: 5312778 (1994-05-01), Collins et al.
patent: 5354381 (1994-10-01), Sheng
patent: 5423945 (1995-06-01), Marks et al.
patent: 5435881 (1995-07-01), Ogle
patent: 5505780 (1996-04-01), Dalvie et al.
patent: 5510011 (1996-04-01), Okamura et al.
patent: 5514603 (1996-05-01), Sato
patent: 5520209 (1996-05-01), Goins et al.
patent: 5542559 (1996-08-01), Kawakami et al.
patent: 5561072 (1996-10-01), Saito
patent: 5569363 (1996-10-01), Bayer et al.
patent: 5572038 (1996-11-01), Sheng et al.
patent: 5578520 (1996-11-01), Zhang et al.
patent: 5587038 (1996-12-01), Cecchi et al.
patent: 5627435 (1997-05-01), Jansen et al.
patent: 5643838 (1997-07-01), Dean et al.
patent: 5646050 (1997-07-01), Li et al.
patent: 5648701 (1997-07-01), Hooke et al.
patent: 5653811 (1997-08-01), Chan
patent: 5654043 (1997-08-01), Shao et al.
patent: 5660895 (1997-08-01), Lee et al.
patent: 5665640 (1997-09-01), Foster et al.
patent: 5674321 (1997-10-01), Pu et al.
patent: 5683517 (1997-11-01), Shan
patent: 5684669 (1997-11-01), Collins et al.
patent: 5711812 (1998-01-01), Chapek et al.
patent: 5718798 (1998-02-01), Deregibus
patent: 5723367 (1998-03-01), Wada et al.
patent: 5770982 (1998-06-01), Moore
patent: 5888413 (1999-03-01), Okumura et al.
patent: 5897752 (1999-04-01), Hong et al.
patent: 5911832 (1999-06-01), Denholm et al.
patent: 5935077 (1999-08-01), Ogle
patent: 5944942 (1999-08-01), Ogle
patent: 5948168 (1999-09-01), Shan et al.
patent: 5985742 (1999-11-01), Henley et al.
patent: 5994207 (1999-11-01), Henley et al.
patent: 5994236 (1999-11-01), Ogle
patent: 5998933 (1999-12-01), Shun'ko
patent: 6000360 (1999-12-01), Koshimuzu
patent: 6013567 (2000-01-01), Henley et al.
patent: 6020592 (2000-02-01), Liebert et al.
patent: 6041735 (2000-03-01), Murzin et al.
patent: 6050218 (2000-04-01), Chen et al.
patent: 6076483 (2000-06-01), Shintani et al.
patent: 6096661 (2000-08-01), Ngo et al.
patent: 6101971 (2000-08-01), Denholm et al.
patent: 6103599 (2000-08-01), Henley et al.
patent: 6103624 (2000-08-01), Nogami et al.
patent: 6132552 (2000-10-01), Donohoe et al.
patent: 6139697 (2000-10-01), Chen et al.
patent: 6150628 (2000-11-01), Smith et al.
patent: 6153524 (2000-11-01), Henley et al.
patent: 6155090 (2000-12-01), Rubenson
patent: 6164241 (2000-12-01), Chen et al.
patent: 6165376 (2000-12-01), Miyake et al.
patent: 6174450 (2001-01-01), Patrick et al.
patent: 6174743 (2001-01-01), Pangrle et al.
patent: 6182604 (2001-02-01), Goeckner et al.
patent: 6187110 (2001-02-01), Henley et al.
patent: 6207005 (2001-03-01), Henley et al.
patent: 6237527 (2001-05-01), Kellerman et al.
patent: 6239553 (2001-05-01), Barnes et al.
patent: 6248642 (2001-06-01), Donlan et al.
patent: 6265328 (2001-07-01), Henley et al.
patent: 6291313 (2001-09-01), Henley et al.
patent: 6291939 (2001-09-01), Dolan et al.
patent: 6300643 (2001-10-01), Fang et al.
patent: 6303519 (2001-10-01), Hsiao et al.
patent: 6305316 (2001-10-01), DiVergilio et al.
patent: 6335536 (2002-01-01), Goeckner et al.
patent: 6339297 (2002-01-01), Sugai et al.
patent: 6341574 (2002-01-01), Bailey, III et al.
patent: 6348126 (2002-02-01), Hanwa et al.
patent: 6350697 (2002-02-01), Richardson et al.
patent: 6392351 (2002-05-01), Shun'ko
patent: 6395150 (2002-05-01), Can Cleemput et al.
patent: 6403453 (2002-06-01), Ono et al.
patent: 6410449 (2002-06-01), Hanawa et al.
patent: 6413321 (2002-07-01), Kim et al.
patent: 6417078 (2002-07-01), Dolan et al.
patent: 6418874 (2002-07-01), Cox et al.
patent: 6426015 (2002-07-01), Xia et al.
patent: 6433553 (2002-08-01), Goeckner et al.
patent: 6453842 (2002-09-01), Hanawa et al.
patent: 6461972 (2002-10-01), Kabansky
patent: 6468388 (2002-10-01), Hanawa et al.
patent: 6475888 (2002-11-01), Sohn
patent: 6494986 (2002-12-01), Hanawa et al.
patent: 6511899 (2003-01-01), Henley et al.
patent: 6513538 (2003-02-01), Chung et al.
patent: 6514838 (2003-02-01), Chan
patent: 6528391 (2003-03-01), Henley et al.
patent: 6551446 (2003-04-01), Hanwa et al.
patent: 6559408 (2003-05-01), Smith et al.
patent: 6579805 (2003-06-01), Bar-Gadda
patent: 6582999 (2003-06-01), Henley et al.
patent: 6593173 (2003-07-01), Anc et al.
patent: 6664187 (2003-12-01), Ngo et al.
patent: 6679981 (2004-01-01), Pan et al.
patent: 6800559 (2004-10-01), Bar-Gadda
patent: 6805941 (2004-10-01), Hayashi
patent: 6811448 (2004-11-01), Paton et al.
patent: 6838695 (2005-01-01), Doris et al.
patent: 6841341 (2005-01-01), Fairbairn et al.
patent: 7097779 (2006-08-01), Mosden et al.
patent: 7109087 (2006-09-01), Autryve et al.
patent: 7109098 (2006-09-01), Ramaswamy et al.
patent: 7115993 (2006-10-01), Wetzel et al.
patent: 7312148 (2007-12-01), Ramaswamy et al.
patent: 7312162 (2007-12-01), Ramaswamy et al.
patent: 7323401 (2008-01-01), Ramaswamy et al.
patent: 7335611 (2008-02-01), Ramaswamy et al.
patent: 2001/0042827 (2001-11-01), Fang et al.
patent: 2002/0012872 (2002-01-01), Kobayashi et al.
patent: 2002/0047543 (2002-04-01), Sugai et al.
patent: 2003/0013260 (2003-01-01), Gossman et al.
patent: 2003/0013314 (2003-01-01), Ying et al.
patent: 2003/0085205 (2003-05-01), Lai et al.
patent: 2003/0186524 (2003-10-01), Ryo
patent: 2003/0196996 (2003-10-01), Jennings et al.
patent: 2004/0104481 (2004-06-01), Ong
patent: 2004/0200417 (2004-10-01), Hanawa et al.
patent: 2004/0229050 (2004-11-01), Li et al.
patent: 2004/0253839 (2004-12-01), Shimizu et al.
patent: 2005/0062388 (2005-03-01), Camm et al.
patent: 2005/0074956 (2005-04-01), Autryve et al.
patent: 2005/0167394 (2005-08-01), Liu et al.
patent: 2006/0019039 (2006-01-01), Hanawa et al.
patent: 2006/0019477 (2006-01-01), Hanawa et al.
patent: 2006/0234458 (2006-10-01), Jennings et al.
patent: 2006/0260545 (2006-11-01), Ramaswamy et al.
patent: 2007/0032082 (2007-02-01), Ramaswamy et al.
patent: 0 546 852 (1993-06-01), None
patent: 0 836 218 (1998-04-01), None
patent: 0 964 074 (1999-12-01), None
patent: 1 111 084 (2001-06-01), None
patent: 1 158 071 (2001-11-01), None
patent: 1154468 (2001-11-01), None
patent: 1 191 121 (2002-03-01), None
patent: 59-86214 (1984-05-01), None
patent: 59-218728 (1984-12-01), None
patent: 62-120041 (1987-06-01), None
patent: 070455542 (1995-02-01), None
patent:
Al-Bayati Amir
Collins Kenneth S.
Gallo Biagio
Hanawa Hiroji
Jennings Dean
Applied Materials Inc.
Burkhart Elizabeth A
Law Office of Robert M. Wallace
Meeks Timothy
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