4. Coating processes
  5. Electrical product produced
  6. Integrated circuit, printed circuit, or circuit board

Kenneth S. Collins

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Active species control with time-modulated plasma

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Apparatus and method for attaining repeatable temperature versus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Apparatus for preventing deposition gases from contacting a sele

Coating apparatus – Gas or vapor deposition
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Center gas feed apparatus for a high density plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Chemical vapor deposition plasma process using an ion shower...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
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Profile ID: LFUS-PAI-P-285288

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