Multi-region processing system and heads

Details Multi-region processing system and heads Multi-region processing system and heads

2007-12-27

2011-10-18

Gambetta, Kelly M (Department: 1715)

Coating processes

Coating by vapor, gas, or smoke

C427S569000, C118S722000

Reexamination Certificate

active

08039052

ABSTRACT:
The various embodiments of the invention provide for relative movement of the substrate and a process head to access the entire wafer in a minimal space to conduct combinatorial processing on various regions of the substrate. The heads enable site isolated processing within the chamber described and method of using the same are described.

REFERENCES:
patent: 6746539 (2004-06-01), Sun et al.
patent: 2005/0016463 (2005-01-01), Hirano
patent: 2006/0127599 (2006-06-01), Wojak
patent: 2006/0231031 (2006-10-01), Dings et al.
patent: 2005120456 (2005-05-01), None

Affiliated with

Also associated with

Rating

Multi-region processing system and heads does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi-region processing system and heads, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-region processing system and heads will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4281575