4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

James Tsung

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Design of hardware features to facilitate arc-spray coating...

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
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Magnetron executing planetary motion adjacent a sputtering...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Method and system for isolated and discretized process...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method and system for mask handling in high productivity...

Coating apparatus – Gas or vapor deposition – Work support
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Multi-region processing system and heads

Coating processes – Coating by vapor – gas – or smoke
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Profile ID: LFUS-PAI-P-2271367

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