4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Rick Endo

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Method and system for mask handling in high productivity...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Multi-region processing system and heads

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2271366

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