Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2006-10-03
2006-10-03
Rosasco, S. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S005000
Reexamination Certificate
active
07115354
ABSTRACT:
An optical imprinting apparatus, and a method for producing a two-dimensional pattern, have line widths less than the wavelength of an exposure light. The evanescent (proximity) field effect is adopted to realize the apparatus and method. An optical imprinting apparatus comprises a container in which light is enclosed, an exposure-mask having a proximity field exposure pattern firmly fixed to a section of the container for exposing the exposure pattern on a photo-sensitive material through an evanescent field by the light enclosed therein; and a light source for supplying the light in the container.
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Hatakeyama Masahiro
Hatamura Yotaro
Ichiki Katsunori
Nakao Masayuki
Satake Tohru
Ebara Corporation
Hatamura Yotaro
Rosasco S.
Wenderoth , Lind & Ponack, L.L.P.
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