4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Making electrical device

Katsunori Ichiki

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Beam processing apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam source

Radiant energy – Electrically neutral molecular or atomic beam devices and...
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Beam source and beam processing apparatus

Radiant energy – Electrically neutral molecular or atomic beam devices and...
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Beam source and beam processing apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Etching method and apparatus

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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Profile ID: LFUS-PAI-P-402884

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