4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Making electrical device

Yotaro Hatamura

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Fabrication apparatus employing energy beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Fabrication method employing and energy beam source

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
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Fabrication method employing energy beam source

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Patent

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Fabrication method with energy beam

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Fine positioning device

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
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Profile ID: LFUS-PAI-P-402887

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