Coating processes – Electrical product produced – Carbon coating
Reexamination Certificate
2006-08-22
2006-08-22
Whitehead, Jr., Carl (Department: 2813)
Coating processes
Electrical product produced
Carbon coating
C427S249100, C427S255500, C427S569000, C438S482000, C438S789000, C438S790000
Reexamination Certificate
active
07094442
ABSTRACT:
A method is provided for forming an amorphous carbon layer, deposited on a dielectric material such as oxide, nitride, silicon carbide, carbon doped oxide, etc., or a metal layer such as tungsten, aluminum or poly-silicon. The method includes the use of chamber seasoning, variable thickness of seasoning film, wider spacing, variable process gas flows, post-deposition purge with inert gas, and post-deposition plasma purge, among others, to make the deposition of an amorphous carbon film at low deposition temperatures possible without any defects or particle contamination.
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Botelho Heraldo L.
Rathi Sudha S. R.
Seamons Martin Jay
Yeh Wendy H.
Applied Materials Inc.
Jr. Carl Whitehead
Patterson and Sheridan
Rodgers Colleen E.
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