4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Wendy H. Yeh

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Absorber layer for DSA processing

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Absorber layer for DSA processing

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Ashable layers for reducing critical dimensions of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Liquid precursors for the CVD deposition of amorphous carbon...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of reducing critical dimension bias during...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2397618

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