4. Coating processes
  5. Electrical product produced
  6. Carbon coating

Sudha S. R. Rathi

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Liquid precursors for the CVD deposition of amorphous carbon...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of depositing an amorphous carbon film for etch...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Methods for the reduction and elimination of particulate...

Coating processes – Electrical product produced – Carbon coating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3014520

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