4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Carl Whitehead Jr.

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Active matrix substrate, method of manufacturing same, and...

Telephonic communications – Emergency or alarm communications – Responsive to sensed nonsystem condition
Reexamination Certificate

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Active matrix type display circuit and method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
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Active matrix type display device and method of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Additional buffer layer for eliminating ozone/tetraethylorthosil

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Adhesion promotion method for CVD copper metallization in IC...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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