Coating processes – Measuring – testing – or indicating
Reexamination Certificate
2007-08-21
2007-08-21
Meeks, Timothy (Department: 1762)
Coating processes
Measuring, testing, or indicating
C427S248100, C118S666000, C219S490000, C219S494000
Reexamination Certificate
active
10733523
ABSTRACT:
The present disclosure provides methods and systems for controlling temperature. The method has particular utility in connection with controlling temperature in a deposition process, e.g., in depositing a heat-reflective material via CVD. One exemplary embodiment provides a method that involves monitoring a first temperature outside the deposition chamber and a second temperature inside the deposition chamber. An internal temperature in the deposition chamber can be increased in accordance with a ramp profile by (a) comparing a control temperature to a target temperature, and (b) selectively delivering heat to the deposition chamber in response to a result of the comparison. The target temperature may be determined in accordance with the ramp profile, but the control temperature in one implementation alternates between the first temperature and the second temperature.
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Basceri Cem
Beaman Kevin L.
Breiner Lyle D.
Doan Trung T.
Kubista David J.
Meeks Timothy
Micro)n Technology, Inc.
Perkins Coie LLP
Turocy David
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