4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

David J. Kubista

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Apparatus and process of improving atomic layer deposition...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – Including change in a growth-influencing parameter
Reexamination Certificate

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Apparatus and process of improving atomic layer deposition...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and process of improving atomic layer deposition...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Methods and apparatus for processing microfeature...

Coating processes – Coating by vapor – gas – or smoke – Plural coatings applied by vapor – gas – or smoke
Reexamination Certificate

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Methods and apparatus for processing microfeature...

Coating processes – Coating by vapor – gas – or smoke – Plural coatings applied by vapor – gas – or smoke
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1544485

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