Method for production of graft copolymer, pattern replication me

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging

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430325, 430324, 430330, 430942, 430967, 430328, 522915, G03F 726

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050174584

ABSTRACT:
The method for production of a graft copolymer according to the present invention includes the step of adding to a base polymer capable of forming first radicals when irradiated with radiation an additive capable of combining with said first radicals to form second radicals stable against oxygen, the step of irradiating said base polymer containing the additive with radiation, and the step of introducing a monomer under an atmosphere free from oxygen, thereby to graft copolymerize said irradiated base polymer and said monomer.

REFERENCES:
patent: 4960676 (1990-10-01), Mochiji et al.
Gazard et al, "Lithographic Technique Using Radiation-Induced Grafting of Acrylic Acid into Poly(methylmethacrylate) Films", Poymer Engineering and Science, Nov. 1980, vol. 20, No. 16, pp. 1069-1072.

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