Etching a substrate: processes
Gas phase etching of substrate
Application of energy to the gaseous etchant or to the...
Inventor
active
Electrostatic chuck with an impregnated, porous layer that exhib
Electrostatic chuck with polymeric impregnation and method of ma
Electrostatic chuck with polymeric impregnation and method of ma
Inductively coupled RF plasma reactor and plasma chamber...
Inductively coupled RF plasma reactor having an antenna...
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