4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Douglas Buchberger

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Electrostatic chuck with an impregnated, porous layer that exhib

Stock material or miscellaneous articles – Composite – Of metal
Patent

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Electrostatic chuck with polymeric impregnation and method of ma

Stock material or miscellaneous articles – Composite – Of metal
Patent

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Electrostatic chuck with polymeric impregnation and method of ma

Coating processes – With post-treatment of coating or coating material – Heating or drying
Patent

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Inductively coupled RF plasma reactor and plasma chamber...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Inductively coupled RF plasma reactor having an antenna...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-316893

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