Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2006-09-13
2008-10-14
Sherry, Michael J (Department: 2836)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
C361S230000
Reexamination Certificate
active
07436645
ABSTRACT:
A pedestal assembly and method for controlling temperature of a substrate during processing is provided. In one embodiment, the pedestal assembly includes an electrostatic chuck coupled to a metallic base. The electrostatic chuck includes at least one chucking electrode and metallic base includes at least two fluidly isolated conduit loops disposed therein. In another embodiment, the pedestal assembly includes a support member that is coupled to a base by a material layer. The material layer has at least two regions having different coefficients of thermal conductivity. In another embodiment, the support member is an electrostatic chuck. In further embodiments, a pedestal assembly has channels formed between the base and support member for providing cooling gas in proximity to the material layer to further control heat transfer between the support member and the base, thereby controlling the temperature profile of a substrate disposed on the support member.
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Translation of Chinese Office Action for CN Application No. 200510116536.0, copy consists of 10unnumbered pages.
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Second Office Action for Chinese Application No. 200510116536.0, May 30, 2008, Copy consists of seven pages (1-3 and 1-4) (APPM/9259 CN) - provides a concise explanation of relevance for B1.
Gani Nicolas
Hegarty Michael F.
Holland John
Katz Dan
Koosau Denis M.
Applied Materials Inc.
Nguyen Danny
Patterson & Sheridan LLP
Sherry Michael J
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