4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Nicolas Gani

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Alternative method for advanced CMOS logic gate etch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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High selectivity and residue free process for metal on thin...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and apparatus for controlling temperature of a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for tuning an RF matching network in a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of etching organic antireflection coating (ARC) layers

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Profile ID: LFUS-PAI-P-2231508

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