4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Steven Aihua Chen

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High temperature resistive heater for a process chamber

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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High temperature susceptor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Multi-zone resistive heater

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Multi-zone resistive heater

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1069683

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