4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Ming Xi

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Apparatus and method for plasma assisted deposition

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Apparatus for cyclical deposition of thin films

Coating apparatus – Gas or vapor deposition
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Atomic layer deposition apparatus

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Atomic layer deposition apparatus

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Atomic layer deposition apparatus

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1069684

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