4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Jeffrie R. Lund

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Abatement of effluent from chemical vapor deposition...

Gas separation: apparatus – Solid sorbent apparatus
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Adaptive GCIB for smoothing surfaces

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Air lock for introducing substrates to and/or removing them...

Coating apparatus – Gas or vapor deposition – With treating means
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Air lock for introducing substrates to and/or removing them...

Coating processes – Coating by vapor – gas – or smoke – Moving the base
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ALD apparatus and method

Coating apparatus – Gas or vapor deposition
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Profile ID: LFUS-PAI-P-25289

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