Gate structures for flash memory and methods of making same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S593000, C438S211000, C257SE21422

Reexamination Certificate

active

07867843

ABSTRACT:
A process may include forming a polysilicon pinnacle above and on a polysilicon island and further forming a floating gate from the polysilicon pinnacle and polysilicon island. The floating gate can bear an inverted T-shape. The floating gate can also be disposed above an isolated semiconductive substrate such as in a shallow-trench isolation semiconductive substrate. Electronic devices may include the floating gate as part of a field effect transistor.

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patent: 2001/0039107 (2001-11-01), Suguro
patent: 2005/0212034 (2005-09-01), Sasago et al.
patent: 2005/0260859 (2005-11-01), Deshpande et al.
patent: 2006/0172498 (2006-08-01), Yamaguchi et al.
patent: 2006/0211260 (2006-09-01), Tran et al.
patent: 2007/0077780 (2007-04-01), Wang et al.

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