Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2007-12-25
2007-12-25
Lebentritt, Michael (Department: 2813)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S938000
Reexamination Certificate
active
10773026
ABSTRACT:
An integrated circuit includes multiple layers. A semiconductor-on-insulator (SOI) wafer can be used to house transistors. Two substrates or wafers can be bonded to form the multiple layers. A strained semiconductor layer can be between a silicon germanium layer and a buried oxide layer. A hydrogen implant can provide a breaking interface to remove a silicon substrate from the silicon germanium layer.
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Besser Paul R.
Ngo Minh Van
Paton Eric N.
Wang Haihong
Xiang Qi
Advanced Micro Devices , Inc.
Doty Heather
Foley & Lardner LLP
Lebentritt Michael
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