Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Co-deposition of nitrogen and metal for metal silicide...
Damascene NiSi metal gate high-k transistor
Damascene NiSi metal gate high-k transistor
Depletion to avoid cross contamination
Electroless deposition of dielectric precursor materials for...
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