4. Fluid sprinkling, spraying, and diffusing
  5. Rigid fluid confining distributor
  6. Fluidic oscillator

Tokyo Electron Ltd.

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Apparatus and method for regulating pressure in two chambers

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for detecting objects to be transferred for use in sem

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent

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Apparatus for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus for the correction of temperature drift for...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Specific application of temperature responsive control system
Reexamination Certificate

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Creating a virtual profile library

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Reexamination Certificate

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