Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2007-07-03
2007-07-03
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000, C355S077000
Reexamination Certificate
active
11163409
ABSTRACT:
A method and apparatus are provided for improving the leveling and, consequently, the focusing of a substrate such as a wafer during the photolithography imaging procedure of a semiconductor manufacturing process. The invention performs a pre-scan of the wafer's topography and assigns importance values to different regions of the wafer surface. Exposure focus instructions are calculated based on the topography and importance values of the different regions and the wafer is then scanned and imaged based on the calculated exposure focus instructions.
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English trranslation of JP 2003-124113 cited on Applicant's PTO-1449.
U.S. Appl. No. 10/905,706, filed Jan. 18, 2005, Brodsky et al.
Brodsky Colin J.
Bukofsky Scott J.
Holmes Steven J.
Liegl Bernhard R.
Blecker Ira D.
DeLio & Peterson LLC
Mathews Alan
Tomaszewski John J.
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