4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Total dielectric isolation

Steven J. Holmes

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Acid sensitive ARC and method of use

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Acid sensitive ARC and method of use

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Alignment methodology for lithography

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
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Alternating phase mask built by additive film deposition

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Assist features for contact hole mask patterns

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Profile ID: LFUS-PAI-P-197929

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