4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

Scott J. Bukofsky

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Density-aware dynamic leveling in scanning exposure systems

Photocopying – Projection printing and copying cameras – Focus or magnification control
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Generating mask patterns for alternating phase-shift mask...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Layout impact reduction with angled phase shapes

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for evaluating the effects of multiple exposure...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Method to overcome image shortening by use of sub-resolution...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2138978

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