CMOS devices with different metals in gate electrodes using...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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Details

C438S267000, C438S277000, C257S369000, C257SE21421, C257SE21623

Reexamination Certificate

active

07943453

ABSTRACT:
A semiconductor structure and a method of forming the same. The semiconductor structure includes a semiconductor substrate, a gate dielectric layer on top of the semiconductor substrate. The structure also includes a first metal containing region on top of the gate dielectric layer. The structure also includes a second metal containing region on top of the gate dielectric layer wherein the first and second metal containing regions are in direct physical contact with each other. The structure further includes a gate electrode layer on top of both the first and second metal containing regions and the gate electrode layer is in direct physical contact with both the first and second metal containing regions. The structure further includes a patterned photoresist layer on top of the gate electrode layer.

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patent: 7510943 (2009-03-01), Li
patent: 2004/0065903 (2004-04-01), Zheng et al.

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