Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
Inventor
active
Air gaps between conductive lines for reduced RC delay of...
CMOS devices with different metals in gate electrodes using...
Collar formation using selective SiGe/Si etch
Deep trench (DT) metal-insulator-metal (MIM) capacitor
Direct contact between high-κ/metal gate and wiring...
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Profile ID: LFUS-PAI-P-2213093