4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Schubert S. Chu

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Apparatus and process for plasma-enhanced atomic layer...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Chemical delivery apparatus for CVD or ALD

Fluid handling – Diverse fluid containing pressure systems – Gas pressure storage over or displacement of liquid
Reexamination Certificate

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Chemical delivery apparatus for CVD or ALD

Fluid handling – Systems – With flow control means for branched passages
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Method of recovering valuable material from exhaust gas...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Vapor deposition processes for tantalum carbide nitride...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2317518

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