4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With gas inlet structure

Norman Nakashima

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Chemical delivery apparatus for CVD or ALD

Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate

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Chemical delivery apparatus for CVD or ALD

Fluid handling – Diverse fluid containing pressure systems – Gas pressure storage over or displacement of liquid
Reexamination Certificate

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Gas delivery apparatus and method for atomic layer deposition

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2809728

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