4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Metal coating

Christophe Marcadal

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Apparatus and process for plasma-enhanced atomic layer...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Atomic layer deposition of tantalum-containing materials...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Barrier layer structure for copper metallization and method...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Chemical delivery apparatus for CVD or ALD

Fluid handling – Diverse fluid containing pressure systems – Gas pressure storage over or displacement of liquid
Reexamination Certificate

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Chemical delivery apparatus for CVD or ALD

Fluid handling – Systems – With flow control means for branched passages
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Profile ID: LFUS-PAI-P-1340452

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