Error detection/correction and fault detection/recovery – Pulse or data error handling – Digital logic testing
Reexamination Certificate
2008-07-15
2008-07-15
Tu, Christine T (Department: 2117)
Error detection/correction and fault detection/recovery
Pulse or data error handling
Digital logic testing
C714S025000
Reexamination Certificate
active
07401275
ABSTRACT:
A testing arrangement for testing a plasma cluster tool having system control software (SCS) for controlling the plasma cluster tool during production. The testing arrangement includes a data manager module for obtaining, via a computer network, specification data pertaining to a component of the plasma cluster tool. The testing arrangement further includes a test manager module configured to provide a set of tests for testing the component, the set of tests incorporating data obtained in the specification data. The testing arrangement additionally includes a SCS interface engine configured to communicate the set of tests with the system control software of the plasma cluster tool, thereby enabling the SCS to execute at least a test in the set of tests to test the component.
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Ballintine Paul Ronald
Hsu Gean
Krishnaiah-Felton Roopa
Ku Tina Pai-Lin
Sarmiento Jaime
IP Strategy Group, P.C.
Lam Research Corporation
Tu Christine T
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