Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
Corporate Assignee
active
No affiliations
300 mm platen and belt configuration
Accurate positioning of a wafer
Acoustic detection of dechucking and apparatus therefor
Activated slurry CMP system and methods for implementing the...
Activated slurry CMP system and methods for implementing the...
LandOfFree
Lam Research Corporation does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Lam Research Corporation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lam Research Corporation will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-49105