Automated test and characterization web services

Error detection/correction and fault detection/recovery – Pulse or data error handling – Digital logic testing

Reexamination Certificate

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C714S025000

Reexamination Certificate

active

07401275

ABSTRACT:
A testing arrangement for testing a plasma cluster tool having system control software (SCS) for controlling the plasma cluster tool during production. The testing arrangement includes a data manager module for obtaining, via a computer network, specification data pertaining to a component of the plasma cluster tool. The testing arrangement further includes a test manager module configured to provide a set of tests for testing the component, the set of tests incorporating data obtained in the specification data. The testing arrangement additionally includes a SCS interface engine configured to communicate the set of tests with the system control software of the plasma cluster tool, thereby enabling the SCS to execute at least a test in the set of tests to test the component.

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“International Search Report”, Issue in PCT Application No.: PCT/US2007/75213; Mailing Date.: Apr. 7, 2008.
“Written Opinion”, Issue in PCT Application No.: PCT/US2007/75213; Mailing Date.: Apr. 7, 2008.

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