Apparatus for processing substrates having a film formed on a su

Details Apparatus for processing substrates having a film formed on a su Apparatus for processing substrates having a film formed on a su

1994-10-28

1996-10-15

Edwards, Laura

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to attribute, absence or presence of work

118712, 118641, 118 52, 118 56, 118 66, 118319, 118320, 118500, 134902, 414935, 414936, 414937, 414941, B05C 500

Patent

active

055650341

ABSTRACT:
A substrate processing apparatus according to this invention includes an interface section having a first transfer member for transferring an object from a coating process section for applying a process solution to the object in accordance with a single sheet process to an object holding member, and a moving member for detachably supplying a plurality of object holding member and simultaneously moving the plurality of object holding member, and a heat-treatment section having a second transfer member for transferring the object placed on the object holding member to a heat-treatment section for heat-treating the plurality of objects, which have undergone the coating process, in accordance with a batch process.

REFERENCES:
patent: 4877123 (1989-10-01), Fukuwatari et al.
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5213118 (1993-05-01), Kamikawa
patent: 5314509 (1994-05-01), Kato et al.
patent: 5364222 (1994-11-01), Akimoto et al.
patent: 5371046 (1994-12-01), Liaw et al.
patent: 5383482 (1995-01-01), Yamada et al.
patent: 5403397 (1995-04-01), Beckers et al.
patent: 5404894 (1995-04-01), Shiraiwa

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