4. Environmental heating and cooling; fluid handling and sanitary e
  5. Fluid handling or treatment equipment
  6. Dispersal

Tokyo Electron Kyushu Limited

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Apparatus and method for developing resist coated on a substrate

Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Patent

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Apparatus and method for developing resist coated on substrate

Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Patent

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Apparatus and method for drying substrates

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Patent

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Apparatus and method for washing substrates

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
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Apparatus and method using optical sensors recessed in channel w

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
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