4. Coating apparatus
  5. With means to centrifuge work

Naruaki Iida

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Apparatus for processing substrates having a film formed on a su

Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to attribute – absence or presence of work
Patent

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Apparatus for processing wafer-shaped substrates

Material or article handling – Device for emptying portable receptacle – Nongravity type
Patent

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Carrier apparatus with more than one carrier belts and processin

Conveyors: power-driven – With means to facilitate working – treating – or inspecting... – Condition responsive control of conveyor or station apparatus
Patent

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Detecting apparatus and detecting method

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Method for processing wafer-shaped substrates

Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent

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Profile ID: LFUS-PAI-P-270893

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