4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...
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Lam Research Co., Ltd.

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Lavinson Eric D.

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Lean B.V.

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Lee Evans Yip

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Lee Jeong-Yun

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Lei Lawrence Chang-Lai

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Leong John Y.

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Leung Wing P.

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Li Kuang-Ya

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Li Pei-Wen

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Li Xia (Susan)

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Li Zhongli

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Linford Matthew B

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Lingampalli Ramkishan Rao

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Liu Patricia M.

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Lo Gladys So-Wan

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Loewenhardt Peter K

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Lubratt Mark P.

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Luo Leroy

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Lupan Michelle

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