4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Ramkishan Rao Lingampalli

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Article for use in a semiconductor processing chamber and...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Electrostatic chuck and method for fabricating the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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RF antenna having high temperature, oxidation resistant coating

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Profile ID: LFUS-PAI-P-53017

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