4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Jeong-Yun Lee

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Method for controlling CD during an etch process

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method of fabricating semiconductor device and synchronous...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Method of manufacturing semiconductor device that includes...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Photomask blank and method of fabricating a photomask from...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Plasma etching chamber and method for manufacturing...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Profile ID: LFUS-PAI-P-2268647

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