4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Patricia M. Liu

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Deposition reactor having vaporizing, mixing and cleaning...

Coating apparatus – Gas or vapor deposition
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Method of fabricating a high dielectric constant transistor...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Methods and apparatus for incorporating nitrogen in oxide films

Coating apparatus – Gas or vapor deposition – With treating means
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Methods and apparatus for incorporating nitrogen in oxide films

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Post deposition treatment of dielectric films for interface...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Profile ID: LFUS-PAI-P-2078956

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