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- Inventors
- Etching a substrate: processes
- Gas phase etching of substrate
- Application of energy to the gaseous etchant or to the...
Details
Leroy Luo
Leroy
Luo
- Patent Class
Etching a substrate: processes
- SubClass
Gas phase etching of substrate
- SubSubClass
Application of energy to the gaseous etchant or to the...
- Specialty
Inventor
- Status
active
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Profile ID: LFUS-PAI-P-2512520
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