Multi-dimensional physical actuation of microstructures
Multilayer lowpass filter with single point ground plane configu
Nanometer electromechanical switch and fabrication process
Phase change control devices and circuits for guiding...
Phase change control devices and circuits for guiding...
Phase change control devices and circuits for guiding...
Phase change control devices and circuits for guiding...
Phase change control devices and circuits for guiding...
PIN diode network for multiband RF coupling
PIN diode switch to AC ground with three biasing sources
Pin diode with field emission device switch
Planarized structure for a reliable metal-to-metal contact...
Radio frequency device using micro-electronic-mechanical...
Resistively matched microwave PIN diode switch
Resonant operation of MEMS switch
RF MEMS switch
RF MEMS switch and fabrication method thereof
RF MEMS switch and fabrication method thereof
RF MEMS switch and method for fabricating the same
RF MEMS switch having asymmetrical spring rigidity