Wave transmission lines and networks – Long line elements and components – Switch
Reexamination Certificate
2007-06-12
2007-06-12
Takaoka, Dean (Department: 2817)
Wave transmission lines and networks
Long line elements and components
Switch
C333S105000, C438S052000
Reexamination Certificate
active
10993805
ABSTRACT:
A planarized substrate structure for an electromechanical device comprising a substrate layer; a dielectric layer formed on the substrate layer, the dielectric layer formed with conductor spaces therein, the dielectric layer further including a dielectric top surface; and a conducting layer formed as a set of conductors in the conductor spaces of the dielectric layer, the conducting layer having a conducting layer top surface, and where the dielectric top surface and the conducting layer top surface are formed in a substantially co-planar fashion to provide a planarized substrate structure.
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Takaoka Dean
Wireless MEMS, Inc.
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