RF MEMS switch and method for fabricating the same

Details RF MEMS switch and method for fabricating the same RF MEMS switch and method for fabricating the same

2006-04-04

2010-06-01

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Switch

C333S105000, C029S592100, C029S600000, C029S832000, C029S840000, C029S846000

Reexamination Certificate

active

07728703

ABSTRACT:
An RF MEMS switch and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate provided with RF signal lines and a cavity, a cantilever positioned on the cavity, having one end fixed to the substrate, and a contact pad connecting the RF signal lines with the cantilever in contact with the RF signal lines when the cantilever is down driven.

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