Nanometer electromechanical switch and fabrication process

Details Nanometer electromechanical switch and fabrication process Nanometer electromechanical switch and fabrication process

2006-11-21

2008-12-09

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Long line elements and components

Switch

C333S105000

Reexamination Certificate

active

07463123

ABSTRACT:
The present invention describes nano-scale fabrication technique used to create a sub-micron wide gap across the center conductor of a coplanar waveguide transmission line configured in a fixed-fixed beam arrangement, resulting in a pair of opposing cantilever beams that comprise an electro-mechanical switch. Accordingly, a nanometer-scale mechanical switch with very high switching speed and low actuation voltage has been developed. This switch is intended primarily for application in the RF/microwave/wireless industry.

REFERENCES:
patent: 5430421 (1995-07-01), Bornand et al.
patent: 7215229 (2007-05-01), Shen et al.
patent: 7321282 (2008-01-01), Lee et al.

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