4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Processes of growth from solid or gel state
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Fabrication method of semiconductor device

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state
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Fabrication method of semiconductor device

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state
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Fabrication method of Si nanocrystals

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state – Using heat
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Fine structure body, process for producing the same, and...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state
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Flash lamp annealing device

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state
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Formation and treatment of epitaxial layer containing...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state
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Formation method for semiconductor layer

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state – Using heat
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