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Copper damascene with low-k capping layer and improved...

Semiconductor device manufacturing: process – Silicon carbide semiconductor
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Method achieving higher inversion layer mobility in novel...

Semiconductor device manufacturing: process – Silicon carbide semiconductor
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Method for etching of silicon carbide semiconductor using select

Semiconductor device manufacturing: process – Silicon carbide semiconductor
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Method for improving adhesion between dielectric material...

Semiconductor device manufacturing: process – Silicon carbide semiconductor
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Method of forming a laterally-varying charge profile in silicon

Semiconductor device manufacturing: process – Silicon carbide semiconductor
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Process for treatment of the surface of a semiconducting...

Semiconductor device manufacturing: process – Silicon carbide semiconductor
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Silicon carbide semiconductor device and method for...

Semiconductor device manufacturing: process – Silicon carbide semiconductor
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